Moreover , the influence of nitrogen or fluorine implantation on ni silicide was also considered .

此外我们也探讨氟离子或氮离子的植入对矽化镍影响。

We combined the concept of implant into silicide ( iis ) and solid phase epitaxial regrowth ( sper ) to achieve both requirements .

我们结合了离子植入矽化物技术制造和固态磊晶再成长的观念去达成这两个需求。