Influence of depositing temperature on gettering film of polysilicon .

沉积温度对多晶硅吸杂薄膜的影响。

Determining gettering rate , sorption capacity and gas content of nonevaporable getters in the molecular flow region .

测量分子流动区域内不挥发吸收剂的吸收速率、吸收能量及气体含量。

The study of aluminum gettering applied to single crystalline silicon wafer .

铝吸杂应用於单晶矽晶圆的探讨。

Improving the efficiency of metallurgical silicon solar cells by porous silicon gettering technique .

以多孔隙矽吸杂法提升冶金矽太阳能电池效率。

The precipitation and gettering behaviors of copper ( cu ) at different defective regions in multicrystalline silicon were investigated by combining scanning infrared microscopy , optical microscopy , inductively coupled plasma mass spectrometry and microwave photo-conductance decay .

采用扫描红外显微镜、光学显微镜、电感耦合等离子质谱仪和微波光电导衰减仪对铜杂质在多晶硅中不同缺陷状态区域的沉淀和吸杂行为进行研究。